Dry Scroll Vacuum Pump: Edwards XDS35i

• Manual
• Ultimate pressure < 0.01 mbar = 8e-3 Torr

Diaphragm Pump: KNF PM30240-N0150.1.2AP.12E

• Manual
• Ultimate pressure = 120 or 25 mbar = 90 or 19 Torr

Turbo Molecular Pump

• Introduction: http://mmrc.caltech.edu/Vacuum/Pfeiffer%20Turbo/Turbos.pdf
• Manual: https://www.ajvs.com/library/Pfeiffer_Vacuum_TMH1001_TMU1001_Manual.pdf

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