Dry Scroll Vacuum Pump: Edwards XDS35i
- Manual
- Ultimate pressure < 0.01 mbar = 8e-3 Torr
Diaphragm Pump: KNF PM30240-N0150.1.2AP.12E
- Manual
- Ultimate pressure = 120 or 25 mbar = 90 or 19 Torr
Turbo Molecular Pump
- Introduction: http://mmrc.caltech.edu/Vacuum/Pfeiffer%20Turbo/Turbos.pdf
- Manual: https://www.ajvs.com/library/Pfeiffer_Vacuum_TMH1001_TMU1001_Manual.pdf
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